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MATERIALSMaterial selection is very important for the design of a high-purity gas distribution system and can impact leak integrity, particle counts, purity, and long-term quality and reliability of the system for the life of the facility. There are numerous materials used in the construction of gas distribution systems, but this discussion will be limited to those most commonly used.
Tubing There is a difference between tube and pipe. The size of a tube is the exact outside diameter (OD) of the tube, whereas the size of a pipe is somewhere in between the OD and ID (inside diameter) and varies with the "schedule" or thickness of the pipe. Tube is most commonly used in the gas distribution system…
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. MATERIALS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export