DESIGN PRINCIPLES


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DESIGN PRINCIPLES
DESIGN PRINCIPLESThe effective design of a gas distribution system is critical to meeting user expectations and should consider purity of the gas, ease of maintenance, flexibility for adding or changing tools and tool layouts throughout the life of the facility, and reliability for the lifetime of the facility.The basic principles for purity, reliability, and longevity are as follows (each discussed in more detail later in the text). Note that for the purposes of discussion, the term "free" is used to mean approaching the minimum or best attainable metric for each principle. Leak-free systems to eliminate atmospheric infiltration or asp…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. DESIGN PRINCIPLES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export