INTRODUCTION


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INTRODUCTION
INTRODUCTIONGas distribution systems have become increasingly more critical to providing high-purity gases to the semiconductor tools. The primary function and goal of a distribution system is to convey the gas from the source of the product to the process tool without adding contaminants. Customers are now expecting some gases to have very low ppb (part per billion) levels of each atmospheric impurity as delivered to the process tool.In a gas supply system the major subsystems are Gas production, either production of the gas off site and delivered to the semiconductor manufacturer's facility, or on-site production of the gas. Point-of-delivery (POD) is typical…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export