ELECTRICAL CHARACTERIZATION


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ELECTRICAL CHARACTERIZATION
ELECTRICAL CHARACTERIZATIONAn SEM-based in situ nanomanipulator (Zyvex S-100) was used to determine the electrical characteristics of the interconnects. We performed these measurements using two tungsten probes having a tip diameter of 20 nm; one of the probes contacted the interconnect while the other contacted the thin gold layer under the PMMA. The quality of the contact between the probe and the nanopillar was an important parameter affecting the reliability of the measurements. In our experiments, achieving good contact (slight penetration into pillars) between the probe and a 50-nm-diameter nanopillar was difficult because of the small pillar diameter. Indeed, we obtained large variations in resistance (from tens of ohms to hundreds of kilohms) for small size nanopillars, depending…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ELECTRICAL CHARACTERIZATION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export