ATE ARCHITECTUREATE ARCHITECTUREFor several decades since the first digital tester appeared in the market the architecture of the production ATE used in the manufacturing test floor was made up of a mainframe unit and a test head. The test head was mounted on a manipulator for docking to wafer prober and device handler for production testing of wafers and packaged parts. Figure 21.8 shows a typical production ATE.
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ATE ARCHITECTURE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering