REFERENCES


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REFERENCES
REFERENCES A. Bums, B. F. Aull, C. K. Chen, C. L. Chen, C. L. Keast, J. M. Knecht, V. Suntharalingam, K. Warner, P. W. Wyatt, D. R. W. Yost, "A wafer-scale 3-D circuit integration technology," IEEE Trans. Electron Devices, Vol. 53, no. 10, 2507–2516, Oct. 2006. M. Koyanagi, H. Kurino, K. W. Lee, K. Sakuma, N. Miyakawa, and H. Itani, IEEE Micro., 18 (4), 17–22, 1998. T. Ohba, N. Maeda, H. Kitada, K. Fujimoto, K. Suzuki, T. Nakamura, A. Kawai, and K. Arai, Microelectron. Eng., 87 (3): 485–490, 2010. ITRS Report 2012 UP…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export