FURTHER READING


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FURTHER READING
FURTHER READING On CD-AFM: Sang-Joon Cho et al., "Three-Dimensional Imaging of Undercut and Sidewall Structures by Atomic Force Microscopy," Review of Scientific Instruments, 82: 023707, 2011. On Metrology: Bo Su, Eric Solecky, and Alok Vaid, Introduction to Metrology Applications in IC Manufacturing, SPIE Press, Bellingham WA, 2015.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export