REFERENCES


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REFERENCES
REFERENCES G. Binnig, C. F. Quate, and Ch. Gerber, "Atomic Force Microscope," Physical Review Letters, 930–933, 1986. Gordon E. Moore, "Progress in Digital Integrated Electronics," Electron Devices Meeting, 21: 11–13, Dec. 1975. H. K. Wickramasinghe, "Scanned-Probe Microscopes," Scientific American, 260 (10): 98–105, 1989. Bo Su, Eric Solecky, and Alok Vaid, Introduction to Metrology Applications in IC Manufacturing, SPIE Press, Bellingham WA, 2015.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export