MAINTENANCE AND CALIBRATION


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MAINTENANCE AND CALIBRATION
MAINTENANCE AND CALIBRATIONCalibration is referred to a process which validates the values collected by a measurement system against a standard. There are different types of measurement standards: National standards. This type of standards is usually kept at national institutions and not available to public. Primary standards. A NIST standard that is certified against a national standard by state-of-the-art calibration process. It can be provided to any organization for any purpose. Secondary standards. A standard calibr…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. MAINTENANCE AND CALIBRATION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export