AUTOMATED AFM FOR IN-LINE METROLOGY


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AUTOMATED AFM FOR IN-LINE METROLOGY
AUTOMATED AFM FOR IN-LINE METROLOGYAlthough AFM has been known widely as a manual lab tool, it was developed significantly over the past decade and automated AFM is now in use as an in-line measurement system in IC fab. An in-line automated AFM unit has typically three modules: Equipment front end module (EFEM). EFEM includes a robotic wafer handler, ports for loading FOUP (front open utility pod) or cassettes, and pre-aligner. The wafer handling is done by this module. Main AFM module. The scanners are located in this module. Sample (e.g. wafer or mask) needs to be loaded to this module for i…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AUTOMATED AFM FOR IN-LINE METROLOGY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export