AFM TECHNIQUE AND FUNDAMENTALS


Please sign in to view the rest of this entry.

AFM TECHNIQUE AND FUNDAMENTALS
AFM TECHNIQUE AND FUNDAMENTALSAFM is one of the scanning probe microscopy (SPM) techniques in which a probe is sensing the sample surface using atomic force [15]. The first SPM technique, scanning tunneling microscopy (STM), was invented few years before invention of AFM and was used for imaging conductive samples using the electron tunneling current [16, 17]. The invention of AFM provided the ability to scan nonconducting samples. The main application of AFM was initially atomic imaging [18–…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. AFM TECHNIQUE AND FUNDAMENTALS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export