METROLOGY: FUNDAMENTALS AND PRINCIPLES


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METROLOGY: FUNDAMENTALS AND PRINCIPLES
METROLOGY: FUNDAMENTALS AND PRINCIPLESMetrology, in a very simple definition, is the science of measurement. In practice, it includes both experimental and theoretical methods of measurement based on the definitions of Joint Committee for Guides in Metrology (JCGM). It can be categorized to physical and chemical metrology. By physical metrology, we refer to measuring physical properties such as length, electrical charge, and electrical current. On the other hand, chemical metrology refers to chemical composition measurement. In this chapter, we are covering physical metrology.Metrology has a short history comparing to measurement. Measurement is referred to a single reported value and has a long history going back to the China's Great Wall or the Pyr…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. METROLOGY: FUNDAMENTALS AND PRINCIPLES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export