CMP CONSUMABLES


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CMP CONSUMABLES
CMP CONSUMABLES
Slurry For CMP process, slurry is a specially formulated chemistry combining some chemicals as well as abrasive(s) in water. Typically, slurries are mixed with an oxidizer either at the time of manufacturing or at the point-of-use before loading on to the CMP tool. Today, the most common oxidizer is hydrogen peroxide and is mixed at the point-of-use. Among other ingredients in slurry, usually one finds organic complexing agents, corrosion inhibitors, and surfactants of various types. The slurry dependence of the removal rate of a particular material that is being polished is due to slurry chemistry, that is, chemical action of the slurry chemicals of the material, the mechanical…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CMP CONSUMABLES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export