FUNDAMENTALS OF ELECTROCHEMICAL DEPOSITION


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FUNDAMENTALS OF ELECTROCHEMICAL DEPOSITION
FUNDAMENTALS OF ELECTROCHEMICAL DEPOSITIONElectrochemical deposition is the neutralization of ions or charged particles in solution to deposit material on a surface. In electrolytic deposition of metals, an external power supply provides electrons needed to reduce positively charged metal ions and form a metallic layer on the substrate (cathode) surface. In electroless deposition, the electrons come from a chemical source instead of an external power supply. In electrophoretic deposition, the deposited material (typically photoresist or paint) is neutral and contained within a charged micelle. The micelle can then be neutralized and deposited on the substrate's surface.
Electrolytic Deposition
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUNDAMENTALS OF ELECTROCHEMICAL DEPOSITION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export