FURTHER READING


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FURTHER READING
FURTHER READING Hwang, C. S. (ed.), Atomic Layer Deposition for Semiconductors, Springer, New York, 2014. Kääriäinen, T., D. Cameron, M. Kääriäinen, and A. Sherman, Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications, 2d ed., Wiley-Scrivener, Hoboken, New Jersey, 2013. Puurunen, R., "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy," Chemical Vapor Deposition, 20: 332–344, 2014. Puurunen, R. L., H. Kattelus, T. Suntola, "Atomic Layer Deposition in ME…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export