HARDWARE AND PROCESS INNOVATIONS TO INCREASE GROWTH RATE IN ALD


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HARDWARE AND PROCESS INNOVATIONS TO INCREASE GROWTH RATE IN ALD
HARDWARE AND PROCESS INNOVATIONS TO INCREASE GROWTH RATE IN ALDThe primary "Achilles' heel" of ALD is the low growth rate, resulting in a high effective cost-of-ownership for the technology. As such, increasing growth rate is relevant for commercial users of ALD. This can be approached from the perspectives of the system hardware or the process itself.From the hardware point of view, process efficiencies can be achieved in several ways. Minimization of system volumes and surface areas can reduce the reactant flux required to reach saturation. Reactant delivery lines should be as sort and narrow as practical to minimize wetted area without sacrificing flow characteristics. Chamber volumes should likewise be minimized. Pulsing …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. HARDWARE AND PROCESS INNOVATIONS TO INCREASE GROWTH RATE IN ALD, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export