DEVELOPING THE ALD PROCESS


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DEVELOPING THE ALD PROCESS
DEVELOPING THE ALD PROCESSEstablishing an ALD process involves developing the self-limited, surface-saturated half reactions that lead to controlled sub-monolayer material growth. This involves a number of steps to map the ALD processing regime for a particular material.
Establishing a Temperature Window Process temperature is a fundamental ALD process characteristic. As the ALD process involves the controlled surface reaction of chemisorbed (or dissociatively adsorbed) reactants, the process temperature should be set such that It is high enough to facilitate chemisorption through precursor decomposition on the surface…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. DEVELOPING THE ALD PROCESS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export