PRIMARY COMMERCIAL APPLICATIONS FOR ALD


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PRIMARY COMMERCIAL APPLICATIONS FOR ALD
PRIMARY COMMERCIAL APPLICATIONS FOR ALDAs noted earlier, TFEL displays were the first major commercial platform for ALD, in this case for the growth of metal sulfides beginning in the mid-1970s. The next significant commercial application was in disk drive manufacturing, specifically the Al2O3 dielectric layer in the magnetic head of the drive. Like the TFEL case, the key enabling ALD property for this application was the fabrication of uniform, pinhole-free films.9Integrated circuit fabrication has been another major application space for ALD. This has taken advantage of various ALD characteristics for …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. PRIMARY COMMERCIAL APPLICATIONS FOR ALD, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export