REFERENCES


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REFERENCES
REFERENCES S. Sivaram, Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials, Springer Science & Business Media, New York, 2013. K. L. Choy, Chemical Vapour Deposition of Coatings, Elsevier, New York, 2003. D. Dobkin and M. K. Zuraw, Principles of Chemical Vapor Deposition, Springer Science & Business Media, New York, 2013. P. M. Martin, Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology, William Andrew, Norwich…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export