THERMODYNAMIC AND KINETIC CONSIDERATIONS


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THERMODYNAMIC AND KINETIC CONSIDERATIONS
THERMODYNAMIC AND KINETIC CONSIDERATIONS
Thermodynamics Mechanism Thermodynamics provide a useful guide in the selection of processing conditions by providing information on the reaction probability of. The nature and amount of solid and gaseous species present in the reaction and after deposition can be determined from the calculation of thermodynamic equilibrium. For a given pressure and temperature, the feasibility of CVD reaction can be judged by calculating the change in Gibbs free energy for the reaction (ΔGr0) under standard conditions (e.g., reactant pressure of 1 atm):
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. THERMODYNAMIC AND KINETIC CONSIDERATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export