HISTORY


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HISTORY
HISTORYIn the 1950s and 1960s, materials fabricated by CVD entered the electronics fields. A major development of this area was the replacement of Ge by Si as the basic semiconductor for device fabrication [45]. The success of Si fabrication by CVD rapidly achieved industrial importance, and Si CVD is commonly applied in the manufacture of different silicon-based semiconductor devices [46–48]. Additionally, the continued downsizing of device geometries has led to CVD of numerous metals and alloys as contacts, or as interconnects.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. HISTORY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export