INTRODUCTION


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INTRODUCTION
INTRODUCTIONChemical vapor deposition (CVD) and related methods, such as plasma-enhanced CVD (PECVD) and atomic layer deposition (ALD) are widely used in the microelectronics industry, and in many other areas, such as photovoltaics manufacture, ceramic protective coating, and even antireflection coating materials. The purpose of this chapter is to provide a general introductory review of this topic, with particular emphasis on applications in microelectronics fabrication. For more detailed information, readers are referred to several comprehensive reviews on this subject [1–4].CVD is one of film deposition methods, and other cho…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. INTRODUCTION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export