REFERENCES


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REFERENCES
REFERENCES W. Wehl, Mikrotechnische Fertigung, Lecture Scriptum, Heilbronn, Germany, 2002. W. Menz, Mikrosystemtechnik für Ingenieure, VCH Verlag, Weinhein, Germany, 1997. K. Schade, Mikroelektroniktechnologie, Verlag Technik, Berlin, Munich, Germany, 1991. W. Pupp, Vakuumtechnik, Hanser Verlag, Munich, Germany, 1991. R. C. West (ed.), CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, Flor…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export