EVAPORATOR EQUIPMENT


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EVAPORATOR EQUIPMENT
EVAPORATOR EQUIPMENTFor evaporation, the source material is heated using either a resistive heater or an electron beam (e-beam evaporation). The drawback of resistive heating of the vapor source is the evaporation of the heater itself leading to contamination of the layer and the limited layer thickness. Furthermore, this process does not allow the deposition of high melting temperature materials such as W, Mo, and Ta. The source material is heated either in a ceramic crucible and evaporator boat, or using an evaporator spiral with twisted tungsten wire. The heat produces an upward vapor column above which the substrate material is moved in concentric circles or planetary motion to ensure constant layer thickness across the substrate.In e-beam evaporation, highly effi…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. EVAPORATOR EQUIPMENT, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export