VACUUM EVAPORATION


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VACUUM EVAPORATION
VACUUM EVAPORATIONVacuum evaporation works on the principle of heating a source material in vacuum until a sufficient vapor pressure for net evaporation of the source material is reached. Equilibrium pressure is the saturation vapor pressure, that is, evaporation and condensation rates are equal. The deposition process includes three stages: Evaporation of target material (evaporation phase) Transport of particles through the vacuum to the substrate (transport phase) Condensation on the substrate (condensation phase) Key characteristics of this process are that the source mate…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. VACUUM EVAPORATION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export