FUNDAMENTALS OF PVD PROCESSES


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FUNDAMENTALS OF PVD PROCESSES
FUNDAMENTALS OF PVD PROCESSESPVD processes are vacuum processes. Hence, it is necessary to briefly introduce some of the main concepts of vacuum physics such as pressure and mean free path. Pressure p can be described as gas molecules with concentration n per unit volume, mass m, and mean velocity v colliding with container walls:
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUNDAMENTALS OF PVD PROCESSES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export