REFERENCES


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REFERENCES
REFERENCES Freeman, J. H. (1970). Implantation Machines. Proc. of the Europ. Conf. on Ion Implant. (pp. 1–18). Reading: Inst. of Physics, Physical Society and Inst. of Electrical Engineers. Shockley, W. (1957). Patent No. 2, Forming Semiconductive Devices by Ionic Bombardment 787, 564. U.S. Wolf, B. (1995). Production of Ions from Nongaseous Material. In B. Wolf, Handbook of Ion Sources. CRC Press, Boca Raton, FL. Penning, F. M. (1936). Die Glimment…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export