OUTLOOK


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OUTLOOK
OUTLOOKIon implantation is essential for the production of modern integrated circuits. The problems encountered in scaling devices and increasing circuit packing densities are motivating many investigations into new process alternatives that allow fabrication of deep submicron devices and ULSI circuits. The alternatives that will be adopted in future manufacturing are those that offer basic relief from scaling problems, simplicity in production, and compatibility with current processes to allow timely, cost-effective implementation in production. Furthermore, they must have flexibility for future developmental needs. Ion implantation meets these criteria, and therefore will remain essential for the production of integrated circuits for the foreseeable future.Several trends in ion …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. OUTLOOK, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export