ION IMPLANTATION APPLICATIONS


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ION IMPLANTATION APPLICATIONS
ION IMPLANTATION APPLICATIONS
Application Space Ion implantation is one of the most established and documented processes in the semiconductor industry at this point, being fully incorporated in the 1970s and in fact, fully enabling modern microchip fabrication through the use of self-aligned processing.28 The self-aligned process, which entails using the structure of the transistor to control the alignment of the doped and undoped areas surrounding the gate, allows reproducibility and device scaling. Arguably, the success of Moore's law
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. ION IMPLANTATION APPLICATIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export