OVERVIEW


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OVERVIEW
OVERVIEW
Definition of Ion Implantation Ion implantation is the placement of atoms into a bulk material using a nonthermal process, by controlling a particle beam of ionized atoms or molecules to penetrate and be deposited into the material, with the goal of changing the bulk material's properties. The particle beam is composed of ions, which permits energy control of the particles via electric fields, as well as accurate beam transport using ion optics. The process is nonthermal, in the sense that the particles distribution inside the bulk results from deceleration of the particles via collisional forces, rather than from an equilibrium of transport from thermal or random motion processes, such as diffusion; because of this, the…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. OVERVIEW, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export