FURTHER READING


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FURTHER READING
FURTHER READING Madou, M., Fundamentals of Microfabrication, Chap. 2, CRC Press, Boca Raton, Florida, 1997. Manos, D. M. and Daniel L. Flamm (eds.), Plasma Etching—An Introduction, Academic Press, Inc., London, 1989.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export