REFERENCES


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REFERENCES
REFERENCES S. K. Ghandhi, VLSI Fabrication Principles, 2d ed., Chap. 9, John Wiley & Sons, Inc., Hoboken, New Jersey, 1994. R. B. Darling, EE527 Microfabrication Wet Etching https://www.ee.washington.edu/research/microtech/cam/PROCESSES/PDF%20FILES/WetEtching.pdf, February 2017. K. N. Bhat, C. Yellampalle, N. DasGupta, A. DasGupta, and P. R. S. Rao, "Optimisation of EDP Solutions for Feature Size Independent Silicon Etching," Proc. SPIE Symposium on Micromachining and Microfabrication, vol. 4979, San Jose, USA, January 2003. W. Scot Ruska,
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export