FURTHER READING


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FURTHER READING
FURTHER READING Dammel, Ralph, "Diazonaphthoquinone-Based Resists," SPIE Tutorial Texts, Vol. TT 11, Bellingham, WA, 1993. Mack, Chris A., "Field Guide to Optical Lithography," SPIE Field Guide Series, Vol. FG06, Bellingham, WA, 2006. Mack, Chris A., Fundamental Principles of Optical Lithography: The Science of Microfabrication, John Wiley & Sons, London, 2007. Mack, Chris A., http://www.lithoguru.com/
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export