IMAGE FORMATION IN OPTICAL LITHOGRAPHY


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IMAGE FORMATION IN OPTICAL LITHOGRAPHY
IMAGE FORMATION IN OPTICAL LITHOGRAPHYProjection imaging tools are sophisticated reduction cameras with stages that allow, through a combination of stepping or stepping and scanning motions, the exposure of many copies of a mask pattern onto a large wafer. The image of the mask that is projected into the photoresist defines the information content used by the photoresist to form the final resist image. Understanding the limits and capabilities of projection imaging is the first step in understanding the limits and capabilities of lithography.Consider the generic projection system shown in Fig. 8.4. It consists of a light source, a
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. IMAGE FORMATION IN OPTICAL LITHOGRAPHY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export