THE LITHOGRAPHIC PROCESS


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THE LITHOGRAPHIC PROCESS
THE LITHOGRAPHIC PROCESSOptical microlithography is basically a photographic process by which a light sensitive polymer, called a photoresist, is exposed and developed to form three-dimensional relief images on the substrate. The general sequence of processing steps for a typical optical lithography process is as follows—substrate preparation, photoresist spin coat, post-apply bake, exposure, post-exposure bake, development, and postbake. A resist strip is the final operation in the lithographic process, after the resist pattern has been transferred into the underlying layer. This sequence is shown diagrammatically in Fig. 8.1, and most of these steps are generally performed on several tools linked together into a conti…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. THE LITHOGRAPHIC PROCESS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export