FURTHER READING


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FURTHER READING
FURTHER READING P.J. Timans, "Rapid Thermal Processing," Handbook of Semiconductor Manufacturing Technology, Second Edition, CRC Press, 2008, 11-1 to 11-116. https://books.google.com/books?id=PsVVKz_hjBgC&pg=SA11-PA38&lpg=SA11-PA38&dq=Heat+Transfer+in+Semiconductor+Fabrication+Furnaces&source=bl&ots=j9sQnXtKav&sig=yLSJPtpmSqE9sKUShWhPWqQHcdE&hl=en&sa=X&ved=0ahUKEwij4YWwvpPSAhXosVQKHQxrC9s4ChDoAQhMMAk#v=onepage&q=Heat%20Transfer%20in%…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FURTHER READING, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export