REFERENCES


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REFERENCES
REFERENCES Gregory J. Wilson, Paul R. McHugh, and Robert A. Weaver, "Numerical Heat Transfer Simulations of a Vertical Batch Furnace Under Closed-Loop Temperature Control," Electrochemical Society Proceedings, Vol 97(9), 110–117. https://books.google.com/books?id=QILlEhEGVzcC&pg=PA110&lpg=PA110&dq=Heat+Transfer+in+Semiconductor+wafer+Furnace+design&source=bl&ots=vwDnkPEkWt&sig=KzotaK25ney1lXo4F9hW7CPuH68&hl=en&sa=X&ved=0ahUKEwjikOi7wpPSAhVEw…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export