REFERENCES


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REFERENCES
REFERENCES L. Royer, "Some Observations on the Epitaxy of Sodium Chloride on Silver," Bull. Soc. Franc. Miner., 51: 7, 1928. Y. Horikoshi et al., "Growth Mechanism of GaAs during Migration Enhanced Epitaxy at Low Growth Temperatures," Jpn. J. Appl. Phys., 27: 169, 1988. M. A. Tishler and S. M. Bedair, "Self-Limiting Mechanism in the Atomic Layer Epitaxy of GaAs," Appl. Phys. Lett., 48: 1681, 1986. E. P. Gusev et al., "Ultra-Thin HfO2 Films Grown on Silicon by Atomic Layer Deposition for Advanced …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export