CONCLUSION


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CONCLUSION
CONCLUSIONThis chapter gives a bird-eye view of the fundamentals of epitaxy, the most common epitaxy processes and equipment and a condensed version of MOCVD growth of GaN for RF/power applications. We also discussed some aspects of manufacturing environment and process control. These topics are vast and require the combined knowledge of various disciplines from material science to quality control and management and to facility operation. A team of experts in all these areas makes a successful epitaxy foundry.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSION, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export