FUTURE EPITAXY TRENDS


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FUTURE EPITAXY TRENDS
FUTURE EPITAXY TRENDSIt is obvious that epitaxy will continue evolving at the same pace as the electronic and photonic industry. Next generation devices will require tighter epilayers specifications and complex structures with abrupt transition layers and doping profiles. Heterogeneous epitaxy with low thermal budgets on patterned substrates will see more acceptances. Epitaxy systems also need to evolve in the same direction with new reactor designs to meet future device specifications, that is, long epitaxial campaigns between scheduled preventive maintenances. In addition, full automation and advanced real-time in situ monitoring and process control of material quality such as photoluminescence, thickness, and composition will be sought to improve the yield, reduce or even eliminate postepitaxy…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUTURE EPITAXY TRENDS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export