SAFETY AND ENVIRONMENTAL HEALTH


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SAFETY AND ENVIRONMENTAL HEALTH
SAFETY AND ENVIRONMENTAL HEALTHThe main concern in the operation of MOCVD epitaxy systems is safety. A substantial part of the cost associated with setting up an MOCVD operation is in the toxic/flammable gas monitoring and alarms systems along with a contingency plan. This is usually part of the facility department. In addition, since only a fraction of the inlet gases is consumed in deposition, the unreacted gases along with the gas-phase reaction by-products are run through the exhaust system. Abatement systems are installed downstream of the MOCVD tools to reduce the emission to the atmosphere. Epi-foundries must comply with Occupational Safety and Health Act (OSHA) codes, Toxic Gas Ordinance, Uniform Fire Code, Clean Air Act, and city/state regulations.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. SAFETY AND ENVIRONMENTAL HEALTH, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export