REFERENCES


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REFERENCES
REFERENCES P. H. Huang, C. Folk, C. Silva, B. Christensen, Y. F. Chen, G. B. Lee, Chen, Minjdar et al., "Applications of MEMS Devices to Delta Wing Aircraft: From Concept Development to Transonic Flight Test," AIAA Paper No. 2001-0124, Reno, Nevada, Jan. 8–11, 2001. G. T. A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, New York, 1998. M. Elwenspoek and R. Wiegerink, Mechanical Microsensors, Springer, Berlin, Germany, 2001. M. Madou, Fundamentals of Microfabrication, CRC Press, Boca Raton, Fl., 1997.
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. REFERENCES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export