CONCLUSIONS


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CONCLUSIONS
CONCLUSIONSMicrosystems are revolutionizing the design of mechanical systems through miniaturization, batch fabrication, and integration with electronics. Microsystem technology is not about a specific application or device, nor a single fabrication process. Rather, this technology provides new and unique capabilities for the development of smart products for all industrial, commercial, and military applications. While microsystems devices may be a fraction of the cost, size, and weight of the products that incorporate them, they will be critical to their performance, reliability, and affordability. This chapter has reviewed microsystem technology and attempted to present this material from the perspective of the IC industry. The microsystem industry shares a common ancestry with the IC but is a much broad…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CONCLUSIONS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export