HOW MICROSYSTEMS ARE MADE


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HOW MICROSYSTEMS ARE MADE
HOW MICROSYSTEMS ARE MADE
Overview of Front-End Manufacturing Processes Microsystems manufacturing is an extremely exciting endeavor due to the customized nature of process technologies and the diversity of processing capabilities. Microsystems manufacturing uses many of the same techniques that are used in the IC domain such as oxidation, diffusion, ion implantation, LPCVD, sputtering, etc., and combines these capabilities with highly specialized micromachining processes. Some of the most widely used micromachining processes are discussed below. Those interested in conventional microelectronics manufacturing technologies are referred to Ref. 10…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. HOW MICROSYSTEMS ARE MADE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export