TECHNOLOGY FUNDAMENTALS OF MICROSYSTEMS


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TECHNOLOGY FUNDAMENTALS OF MICROSYSTEMS
TECHNOLOGY FUNDAMENTALS OF MICROSYSTEMS
Microsensors Technology Many different types of sensors have been demonstrated using micromachined devices including pressure, acoustic, temperature (including infrared focal plane arrays), inertia (including acceleration and rate rotation sensors), magnetic field (Hall, magnetoresistive, and magnetotransistors), force (including tactile), strain, optical, radiation, and chemical and biological sensors.2–5 As discussed above, microsensors are transducers that convert one form of energy, …
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. TECHNOLOGY FUNDAMENTALS OF MICROSYSTEMS, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export