THE DEFINITION OF MEMS AND MICROSYSTEMS TECHNOLOGIES


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THE DEFINITION OF MEMS AND MICROSYSTEMS TECHNOLOGIES
THE DEFINITION OF MEMS AND MICROSYSTEMS TECHNOLOGIESMicrosystems, or microelectromechanical systems (MEMS), is a technology that in its most general form can be defined as miniaturized mechanical devices and structures made using the techniques of microfabrication. The critical physical dimensions of microsystems devices can vary from well below 1 μm to several millimeters. The types of devices encompassed by microsystems can vary from relatively simple structures wherein there are no mechanically moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of microelectronics integrated into the same silicon substrate. Obviously, the one main criterion of microsystems is that there are at least some elements on the…
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. THE DEFINITION OF MEMS AND MICROSYSTEMS TECHNOLOGIES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export