CHAPTER PRELIMINARIES


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CHAPTER PRELIMINARIES
CHAPTER PRELIMINARIESBYMICHAEL A. HUFFMNX, Corporation for National Research Initiatives, Reston, Virginia THE DEFINITION OF MEMS AND MICROSYSTEMS TECHNOLOGIES WHY MICROSYSTEMS ARE IMPORTANT TECHNOLOGY FUNDAMENTALS OF MICROSYSTEMS
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. CHAPTER PRELIMINARIES, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export