NANOTECHNOLOGY METROLOGY


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NANOTECHNOLOGY METROLOGY
NANOTECHNOLOGY METROLOGYNanotechnology metrology is another important set of technologies that are used mostly for metrology purposes including the scanning tunneling microscope (STM), the atomic force microscope (AFM), the scanning electron microscope (SEM) and the transmission electron microscope (TEM), x-ray diffraction, high-resolution transmission electron microscopy, and field emission scanning electron microscopy. We discuss the STM and AFM in more detail further. The other technologies have been in existence for a far longer time and the interested reader can explore them in detail in various references.55–63
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. NANOTECHNOLOGY METROLOGY, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export