FUNDAMENTAL METHODS OF FABRICATION AT THE NANOSCALE


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FUNDAMENTAL METHODS OF FABRICATION AT THE NANOSCALE
FUNDAMENTAL METHODS OF FABRICATION AT THE NANOSCALEThere are two general approaches involved in the implementation of nanotechnology. The first is the "top-down" approach and entails the use of fabrication processes and techniques to shape and form nano-dimensional scale elements from larger-sized sections of material. The top-down approach involves production techniques that are largely equivalent to those used in the IC and microsystems industries and include deposition of thin films (perhaps having thicknesses in the nanometer range), lithography to make desired patterns in a photosensitive polymer layer, and etching.23,
Citation
Hwaiyu Geng, CMfgE, PE: Semiconductor Manufacturing Handbook, Second Edition. FUNDAMENTAL METHODS OF FABRICATION AT THE NANOSCALE, Chapter (McGraw-Hill Professional, 2018 2005), AccessEngineering Export