Optofluidic Maskless Lithography and Guided Self-Assembly


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Optofluidic Maskless Lithography and Guided Self-Assembly
Wook Park, Su Eun Chung, Seung Ah Lee, and Sunghoon Kwon Department of Electrical Engineering, Seoul National University, Seoul, Republic of Korea In this chapter, concepts in optofluidics are applied to an advanced manufacturing technology based on self-assembled microparts. The “optical” aspect of optofluidics will be described in the context of photolithography, and the “fluidic” aspect will be discussed in the context of self-assembly. First, optofluidic maskless lithography will be introduced as a dynamic fabrication method to generate microparticles in microfluidic channel…
Citation
Yeshaiahu Fainman; Demetri Psaltis; Changhuei Yang: Optofluidics: Fundamentals, Devices, and Applications. Optofluidic Maskless Lithography and Guided Self-Assembly, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export